HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.0% (by GC, corrected for water content), CMOS for microelectronic, J.T.Baker®

Danger

Synonyms: Hexamethyldisilazane

Management of Change (MOC) category = R

9352-03 BAKR9352-03
JT9352-3CS 5311.15 USD
CAJT9352-3 JT9352-3
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.0% (by GC, corrected for water content), CMOS for microelectronic, J.T.Baker®
HMDS (1,1,1,3,3,3-Hexamethyldisilazane)
Formula: (CH₃)₃SiNHSi(CH₃)₃
MW: 161.39 g/mol
Boiling Pt: 126 °C (1013 hPa)
Melting Pt: –82 °C
Density: 0.7742 g/cm³ (20 °C)
Flash Pt: 6 °C
Storage Temperature: Ambient
MDL Number: MFCD00008259
CAS Number: 999-97-3
EINECS: 213-668-5
UN: 3286
ADR: 3, 6.1, 8,II
REACH: 01-2119438176-38
Merck Index: 13,04708
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Specification Test Results

For Microelectronic Use
Assay ([(CH₃)₃Si]₂NH) (by GC, corrected for water) ≥99.0 %
Trailing Impurities, Total (by GC) ≤0.1 %
Appearance Passes Test
Color (APHA) ≤10
Residue after Evaporation ≤10 ppm
Turbidity (NTU) ≤1.0
UV Absorbance - 270 nm ≤0.250
Water (by KF,Coulometric) (H₂O) ≤0.1 %
Chloride (Cl) ≤2.0 ppm
Trace Impurities - Aluminum (Al) ≤100.0 ppb
Arsenic and Antimony (as As) ≤10.0 ppb
Trace Impurities - Barium (Ba) ≤100.0 ppb
Trace Impurities - Boron (B) ≤100.0 ppb
Trace Impurities - Cadmium (Cd) ≤50 ppb
Trace Impurities - Calcium (Ca) ≤100.0 ppb
Trace Impurities - Chromium (Cr) ≤100.0 ppb
Trace Impurities - Cobalt (Co) ≤20 ppb
Trace Impurities - Copper (Cu) ≤10.0 ppb
Trace Impurities - Gallium (Ga) ≤100.0 ppb
Trace Impurities - Germanium (Ge) ≤100.0 ppb
Trace Impurities - Gold (Au) ≤10.0 ppb
Heavy Metals (as Pb) ≤100 ppb
Trace Impurities - Iron (Fe) ≤50.0 ppb
Trace Impurities - Lead (Pb) ≤10.0 ppb
Trace Impurities - Lithium (Li) ≤100.0 ppb
Trace Impurities - Magnesium (Mg) ≤100.0 ppb
Trace Impurities - Manganese (Mn) ≤100.0 ppb
Trace Impurities - Nickel (Ni) ≤100.0 ppb
Trace Impurities - Potassium (K) ≤50 ppb
Trace Impurities - Silver (Ag) ≤100.0 ppb
Trace Impurities - Sodium (Na) ≤100.0 ppb
Trace Impurities - Strontium (Sr) ≤50 ppb
Trace Impurities - Tin (Sn) ≤100 ppb
Trace Impurities - Zinc (Zn) ≤100.0 ppb
Particle count - 0.1 µm and greater ≤3000 par/ml
Particle count - 0.2 µm and greater ≤575 par/ml
Particle count - 0.5 µm and greater ≤40 par/ml
Particle count - 1.0 µm and greater ≤10 par/ml

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