HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.0% (by GC, corrected for water content), CMOS for microelectronic, J.T.Baker®
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Danger
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Synonyms:
Hexamethyldisilazane
Management of Change (MOC) category = R
9352-03
BAKR9352-03
JT9352-3CS
5311.15
USD
CAJT9352-3
JT9352-3
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.0% (by GC, corrected for water content), CMOS for microelectronic, J.T.Baker®
HMDS (1,1,1,3,3,3-Hexamethyldisilazane)
Formula:
(CH₃)₃SiNHSi(CH₃)₃ MW: 161.39 g/mol Boiling Pt: 126 °C (1013 hPa) Melting Pt: –82 °C Density: 0.7742 g/cm³ (20 °C) Flash Pt: 6 °C Storage Temperature: Ambient |
MDL Number:
MFCD00008259 CAS Number: 999-97-3 EINECS: 213-668-5 UN: 3286 ADR: 3, 6.1, 8,II REACH: 01-2119438176-38 Merck Index: 13,04708 |
Specification Test Results
For Microelectronic Use | |
Assay ([(CH₃)₃Si]₂NH) (by GC, corrected for water) | ≥99.0 % |
Trailing Impurities, Total (by GC) | ≤0.1 % |
Appearance | Passes Test |
Color (APHA) | ≤10 |
Residue after Evaporation | ≤10 ppm |
Turbidity (NTU) | ≤1.0 |
UV Absorbance - 270 nm | ≤0.250 |
Water (by KF,Coulometric) (H₂O) | ≤0.1 % |
Chloride (Cl) | ≤2.0 ppm |
Trace Impurities - Aluminum (Al) | ≤100.0 ppb |
Arsenic and Antimony (as As) | ≤10.0 ppb |
Trace Impurities - Barium (Ba) | ≤100.0 ppb |
Trace Impurities - Boron (B) | ≤100.0 ppb |
Trace Impurities - Cadmium (Cd) | ≤50 ppb |
Trace Impurities - Calcium (Ca) | ≤100.0 ppb |
Trace Impurities - Chromium (Cr) | ≤100.0 ppb |
Trace Impurities - Cobalt (Co) | ≤20 ppb |
Trace Impurities - Copper (Cu) | ≤10.0 ppb |
Trace Impurities - Gallium (Ga) | ≤100.0 ppb |
Trace Impurities - Germanium (Ge) | ≤100.0 ppb |
Trace Impurities - Gold (Au) | ≤10.0 ppb |
Heavy Metals (as Pb) | ≤100 ppb |
Trace Impurities - Iron (Fe) | ≤50.0 ppb |
Trace Impurities - Lead (Pb) | ≤10.0 ppb |
Trace Impurities - Lithium (Li) | ≤100.0 ppb |
Trace Impurities - Magnesium (Mg) | ≤100.0 ppb |
Trace Impurities - Manganese (Mn) | ≤100.0 ppb |
Trace Impurities - Nickel (Ni) | ≤100.0 ppb |
Trace Impurities - Potassium (K) | ≤50 ppb |
Trace Impurities - Silver (Ag) | ≤100.0 ppb |
Trace Impurities - Sodium (Na) | ≤100.0 ppb |
Trace Impurities - Strontium (Sr) | ≤50 ppb |
Trace Impurities - Tin (Sn) | ≤100 ppb |
Trace Impurities - Zinc (Zn) | ≤100.0 ppb |
Particle count - 0.1 µm and greater | ≤3000 par/ml |
Particle count - 0.2 µm and greater | ≤575 par/ml |
Particle count - 0.5 µm and greater | ≤40 par/ml |
Particle count - 1.0 µm and greater | ≤10 par/ml |
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