Mixed acid etchant 3:1:0
62026
89400-794CS
557.97
USD
89400-794
Mixed acid etchant 3:1:0
Mixed acid etchant
Mixed acid etchant (MAE®) consists of volume ratios of nitric acid, hydrofluoric acid and acetic acid. Mixed acid etchants are widely used to etch silicon substrates and polysilicon films.
Specification Test Results
Assay (HF) | 13.70 - 14.70% |
Assay (HNO3) | 48.70% - 50.70% |
Total Acidity | 14.58 - 15.40 meq/g |
Chloride | 5000 ppb |
Phosphate | 1000 ppb |
Sulfate | 1000 ppb |
Aluminum | 300 ppb |
Antimony | 5 ppb |
Arsenic | 5 ppb |
Boron | 100 ppb |
Calcium | 300 ppb |
Chromium | 200 ppb |
Copper | 100 ppb |
Gold | 100 ppb |
Iron | 300 ppb |
Lead | 300 ppb |
Magnesium | 300 ppb |
Manganese | 300 ppb |
Nickel | 100 ppb |
Potassium | 300 ppb |
Sodium | 300 ppb |
Tin | 100 ppb |
Titanium | 100 ppb |
Zinc | 300 ppb |
1.00µ Particle Count | 20 par/ml |
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